Physical Sciences and Mathematics Commons^™

Inversion Of The Nonlinear Equations Of Reflection Ellipsometry For Uniaxial Crystals In Symmetrical Orientations, M. Elshazly-Zaghloul, R. M.A. Azzam

Electrical Engineering Faculty Publications

The complex ordinary (N_o) and extraordinary (N_e) refractive indices of an absorbing uniaxial crystal can be determined using reflection ellipsometry. The measurements are taken with the optic axis parallel and perpendicular to the crystal’s surface. The equations obtained are solved without resort to iterative methods; N_o and N_e are determined separately. Sixteen solution sets (N_o, N_e) are obtained and the correct solution can be easily identified. We present an optimum angle of incidence that minimizes the relative errors in N_o and N_e.