Physical Sciences and Mathematics Commons^™

High Resolution Ion Beam Investigations Of The Mechanisms Of Titanium Anodization, Mitchell A. Brocklebank

Electronic Thesis and Dissertation Repository

The unique behaviour of thin films, and their surfaces and interfaces, significantly impact material and device properties. Probing these structures with ion beams (IB) provides quantitative composition and thicknesses measurements. In this dissertation, the IB techniques of medium energy ion scattering (MEIS), nuclear reaction profiling (NRP) and Rutherford backscattering spectrometry (RBS) are used to analyze energy losses in ultra-thin films, as well as elucidate the mechanisms of anodic film growth.

Accurate stopping cross sections of protons, ε, in the medium energy range (50-170 kV) often show deviations from Bragg’s rule. Here, ε_Ti, ε_Si, and ε_{TiO2 …}