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Magnetic Properties And Defects In Iron Implanted Strontium Titanate Single Crystals And Thin Films, Misha Chavarha

Electronic Thesis and Dissertation Repository

Physical vapor deposition was used to grow good quality crystalline stoichiometric SrTiO₃ thin films on Si(001) substrate using a systematic approach starting from understanding of kinetics and thermodynamics of the system and finishing with the development of procedure for high quality SrTiO₃/Si interface. Growth of optimized SrTiO₃ perovskite structure on Si requires careful transformation of a thin interfacial SrSix layer into the initial SrTiO₃ lattice cells. The critical aspects of the growth, such as low temperature and low oxidant partial pressure, are explained in details. Crystallinity and stoichiometry of SrTiO₃ were verified using powder …