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Physical Sciences and Mathematics Commons

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Chemistry

University of South Carolina

2019

Atomic layer deposition

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Nanoscale Control Of Metal Oxideand Carbonaceous Functional Materials, Benjamin W. Lamm Apr 2019

Nanoscale Control Of Metal Oxideand Carbonaceous Functional Materials, Benjamin W. Lamm

Theses and Dissertations

The controlled fabrication of nanometer scale devices is of fundamental concern for numerous technologies, from separations to electronics and catalysis. The complexity of device architectures calls for the development of synthetic methods that independently control each feature: pore dimensions, wall thickness, and any subsequent functional nanomaterial layers (e.g. photoactive electrocatalysts). Precision control over these orthogonal methods can be used to integrate 3D and 1D nanostructures.

This dissertation presents the development of techniques useful in fabricating highly controlled nanoscale devices. The growth of single-phase bismuth vanadate (BiVO4) by atomic layer deposition (ALD) is demonstrated for the first time, allowing for the …