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High Accuracy And Automatic Measurement Of The Pattern Linewidth On Very Large Scale Integrated Circuits, H. Yamaji, M. Miyoshi, M. Kano, K. Okumura

Scanning Electron Microscopy

High accuracy measurement of pattern linewidth is particularly important in Very Large Scale Integrated Circuits (VLSI) manufacturing.

The measurement of pattern linewidth has been done by optical methods. However, the optical methods have several problems: as the measured value depends on slope angle at pattern edge, thickness and optical property of film and also substrate, there exists a large difference in size (0.3 μm) between the defined edge and the true edge in case of photoresist linewidth measurements. Especially, the optical methods have severe problems to measure bottom of pattern edge and are unsuitable to measure pattern linewidth in VLSI's …

Detection System For Scanning Electron Microscope, J. Hejna, Z. Radzimski, A. Buczkowski

Scanning Electron Microscopy

The kind of information and the quality of the backscattered electron (BSE) images depend upon numerous features of the detector. Therefore, various types of detectors should be used simultaneously to obtain as much of information as possible. The detection system presented here contains a large area semiconductor detector and a BSE to secondary electrons (SE) converter system. These two different kinds of detectors give different BSE images. After subtracting the signal of a semiconductor detector from that of a converter system, an image with good topography and reduced material contrast can be achieved.

The Ependyma Of The Cat Central Canal, With Particular Reference To Its Mitochondria-Containing Bulbs, K. Rascher, K. H. Booz, A. C. Nacimiento, E. Donauer

Scanning Electron Microscopy

The ultrastructure of the ependyma in the central canal of adult cats was examined in both the scanning and the transmission electron microscopes (SEM and TEM).

The same morphological details were seen in the ependyma of the central canal as have so frequently been described in the ependyma of the brain ventricular system, for example bundles of cilia, single cilia, microvilli and occasional small cytoplasmic protrusions. The supraependymal cells and supraependymal nerve fibers found in the central canal also resembled those seen in the ventricular system.

The most striking feature of the canal ependyma were the large, spherical bodies containing …

Scanning And Transmission Electron Microscopic Studies On The Oviducts Of Pekin Ducks Fed Methyl Mercury Containing Diets, A. Balachandran, M. K. Bhatnagar, H. D. Geissinger

Scanning Electron Microscopy

This study was undertaken to examine the effects of varying levels of methyl mercury (MeHg) on the ultrastructure of the surface epithelium of the oviduct of ducks. Accordingly, Pekin ducks were maintained on feed containing varying doses of (0.0; 0.5; 5.0; 15.0 ppm) of MeHg (Group I - control to IV) for 12 weeks and sacrificed. Tissue from the magnum and the shell gland regions of the oviduct was processed for scanning electron microscopy (SEM) and transmission electron microscopy (TEM). It was found that the primary and secondary folds of these regions of the oviducts of the control and 0.5 …

Energy Dispersive X-Ray Analysis Of Ocean Ferromanganese Crusts Using Conventional Zaf Corrections, R. F. Commeau, J. A. Commeau, F. W. Brown, F. T. Manheim

Scanning Electron Microscopy

Ocean ferromanganese crusts are composed of interlayered phases of manganese oxide, iron oxide and oxyhydroxide, calcium carbonate/phosphate, silica, and alumino-silicates. These interlayers are so thin and fine-grained that each phase could not be isolated under the beam of a scanning electron microscope for quantitative x-ray microanalysis. A test was conducted to determine if the grain size of the phases was small enough to allow conventional ZAF techniques to be used without serious errors in the results. A "synthetic" ferromanganese crust was prepared by pelletization of a 1:1 mix of two fine-grained (<5 >micrometer) components. The mean of the energy dispersive …

A Comparison Of Lanthanum Hexaboride, Cold Field Emission And Thermal Field Emission Electron Guns For Low Voltage Scanning Electron Microscopy, J. Orloff

Scanning Electron Microscopy

A comparison of lanthanum hexaboride, cold W(310) field emission and Zr/W thermal field emission cathodes was made by calculating the current-spot size relationship for each, using comparable lenses, to determine which would be suitable for high current operation at 1 keV beam energy, with a focused beam diameter < 0.05 μm. On the criteria of highest current, reasonable operating conditions for the gun for low noise operation and long term cathode stability it was found that the lanthanum hexaboride and cold field emission cathodes are inadequate or marginal and that the best performance is obtainable from the thermal field emission cathode.