Open Access. Powered by Scholars. Published by Universities.®

Engineering Commons

Open Access. Powered by Scholars. Published by Universities.®

2020

USF Tampa Graduate Theses and Dissertations

Microelectromechanical Systems

Articles 1 - 2 of 2

Full-Text Articles in Engineering

Design And Implementation Of Solid/Solid Phononic Crystal Structures In Lateral Extensional Thin-Film Piezoelectric On Silicon Micromechanical Resonators, Abdulrahman Alsolami Nov 2020

Design And Implementation Of Solid/Solid Phononic Crystal Structures In Lateral Extensional Thin-Film Piezoelectric On Silicon Micromechanical Resonators, Abdulrahman Alsolami

USF Tampa Graduate Theses and Dissertations

Achieving high quality factor in MEMS resonator devices is a critical demand for today’s wireless communication and sensing technologies. In order to reach this goal, several dedicated prior works have been conducted based on published literature at different frequency ranges. Particularly, piezoelectrically transduced resonators, which are widely deployed in commercial wireless communication systems, could benefit from greatly improved qualify factor. So far, their development has evolved from thin film bulk acoustic resonators (FBAR’s) using surface attached piezoelectric thin-film transducers with moderate Q factors to high Q resonators equipped with a side-supporting tether (anchor) attached vibrating resonators that allow the devices …


Hybrid Rf Acoustic Resonators And Arrays With Integrated Capacitive And Piezoelectric Transducers, Adnan Zaman Nov 2020

Hybrid Rf Acoustic Resonators And Arrays With Integrated Capacitive And Piezoelectric Transducers, Adnan Zaman

USF Tampa Graduate Theses and Dissertations

Over the past few decades, the usage of mobile communication devices such as smartphones, laptop computers, tablets has grown significantly. Clearly, smartphones and other mobile gadgets have been leading the current and emerging market thanks to the fast growing of wireless communications. Therefore, the wireless communications market is constantly looking for new ways to miniaturize the RF front-ends, while reducing the size, cost, and power consumption. Radio frequency microelectromechanical systems (RF MEMS) is widely viewed as a potential enabling technology for the multi-standard monolithic transceivers on a single chip with high reliability, high performance, and very low DC power consumption. …