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Low-Cost, Water Pressure Sensing And Leakage Detection Using Micromachined Membranes, Farhana Anwar
Low-Cost, Water Pressure Sensing And Leakage Detection Using Micromachined Membranes, Farhana Anwar
Master's Theses (2009 -)
This work presents the only known SOI membrane approach, using Microelectromechanical systems (MEMS) fabrication techniques, to address viable water leakage sensing requirements at low cost. In this research, membrane thickness and diameter are used in concert to target specific stiffness values that will result in targeted operational pressure ranges of approximately 0-120 psi. A MEMS membrane device constructed using silicon-on-insulator (SOI) wafers, has been tested and packaged for the water environment. MEMS membrane arrays will be used to determine operational pressure range by bursting.Two applications of these SOI membranes in aqueous environment are investigated in this research. The first …
Liquid Flowmeter Using Thermal Measurement; Design And Application, Woojae Chung
Liquid Flowmeter Using Thermal Measurement; Design And Application, Woojae Chung
Master's Theses (2009 -)
This thesis presents flowmeter devices which can measure flowrate, pressure and temperature offlowing liquid samples using thermal measurement method. Typical thermal mass flowmeter usesthermal properties of materials to obtain flow features only for gases. We designed and fabricatedflowmeter devices with various functionalities such as: measuring properties of flowing liquid andidentifying the type of liquid samples.Thermal measurement methods using temperature sensor is a key of our flowmeter’s workingprinciple. The thermal mass flowmeter consists of a glass capillary, a tungsten wire heater, and aresistance temperature detector (RTD) sensor. The heater and sensors are integrated on …