Engineering Commons^™

Optical Angular Scatterometry: In-Line Approach For Roll-2-Roll And Nano-Imprint Fabrication Systems, Juan Jose Faria-Briceno

Electrical and Computer Engineering ETDs

As critical dimensions continue to shrink and structures become more complex, metrology processes are challenging to implement during in-line nanomanufacturing. Non-destructive, non-contact, and high-speed conditions are required to achieve proper metrology processes during in-line manufacturing. Optical scatterometry is a nanoscale metrology tool widely used in integrated circuit manufacturing for characterization and quality control. However, most applications of optical scatterometry operate off-line. A high-speed, in-line, non-contact, non-destructive scatterometry angular system has been demonstrated in this work to scan pattern surfaces during real-time nano-fabrication.

Our system has demonstrated scanning capabilities using flat, 1D and 2D complex structures. The flat surface samples consist …

Integrated Chirped-Grating Spectrometer-On-A-Chip, Shima Nezhadbadeh

Optical Science and Engineering ETDs

In this dissertation we demonstrate a new structure based on waveguide coupling atop a silicon wafer using a chirped grating to provide the dispersion that leads to a high-resolution, compact, fully integrable and CMOS-compatible spectrometer. Light is both analyzed and detected in a single, completely monolithic component which enables realizing a high-resolution portable spectrometer with an extremely compact footprint. The structure is comprised of a SiO₂/Si₃N₄/SiO₂ waveguide on top of a silicon wafer. Grating regions are fabricated on the top cladding of the waveguide. The input light is incident on a chirped grating …

Pixelated Gasb Membranes For Photovoltaics: Fabrication And Structure-Property Relationships, Vijay Saradhi Mangu

Electrical and Computer Engineering ETDs

In this thesis, I present a reliable and efficient approach to heterogeneous integration of single-crystalline GaSb semiconductors with highly mismatched materials. The mismatch may refer to the crystalline structure and the thermal expansion coefficient of single-crystalline GaSb and the other materials of interest. The strategy of hetero-integration relies on epitaxial lift-off. This approach prevents the formation of extended structural defects that are detrimental to the performance of optoelectronic devices and preserves GaSb growth substrates for potential reuse.

Within my research work, I have overcome some outstanding challenges of epitaxial lift-off of GaSb, and I have demonstrated the operation of single-crystalline …

Symmetry And Dopant Diffusion In Inverted Nanopyramid Arrays For Thin Crystalline Silicon Solar Cells, Seok Jun Han

Chemical and Biological Engineering ETDs

In this dissertation, we enhance the efficiency of thin flexible monocrystalline silicon solar cells by breaking symmetry in light trapping nanostructures and improving homogeneity in dopant concentration profile. These thin cells are potentially less expensive than conventional thick silicon cells by using less silicon material and making the cells more convenient to be handled when supported on polymer films. Moreover, these cells are widely applicable due to their flexibility and lightweight. However, for high efficiencies, these cells require effective light trapping and charge collection. We achieve these in cells based on 14-mm-thick free-standing silicon films with light-trapping arrays of nanopyramidal …

Algorithmic Multi-Color Cmos Avalanche Photodiodes For Smart-Lighting Applications, Md Mottaleb Hossain

Optical Science and Engineering ETDs

Future smart-lighting systems are expected to deliver adaptively color-tunable and high-quality lighting that is energy efficient while also offering integrated visible-light wireless communication services. To enable these systems at a commercial level, inexpensive and fast sensors with spectral-sensing capability are required. CMOS-compatible silicon avalanche photodiodes (APDs) can be an excellent fit to this problem due to their excellent sensitivity, high speeds and cost effectiveness; however, color sensing is a challenge without resorting to expensive spectral filters, as done in commercially. To address this challenge, we have recently designed and modeled a novel CMOS-compatible dual-junction APD. The device outputs two photocurrents …