Engineering Commons^™

Development Of Mems-Based Corrosion Sensor, Feng Pan

Graduate Theses and Dissertations

This research is to develop a MEMS-based corrosion sensor, which is used for monitoring uniform, galvanic corrosion occurring in infrastructures such as buildings, bridges. The corrosion sensor is made up of the composite of micro/nano metal particles with elastomers. The mechanism of corrosion sensor is based on the mass transport of corrosive species through the sensor matrix. When the metal particles in the matrix corrode, the electrical resistivity of the material increases due to increasing particle resistances or reduction of conducting pathways. The corrosion rate can be monitored by detecting the resistivity change in sensing elements. The life span of …

Design And Testing Of A Biological Microelectromechanical System For The Injection Of Thousands Of Cells Simultaneously, Gregory Herlin Teichert

Theses and Dissertations

The ability to inject DNA and other foreign particles into cells, both germ cells (e.g. to produce transgenic animals) and somatic cells (e.g. for gene therapy), is a powerful tool in genetic research. Nanoinjection is a method of DNA delivery that combines mechanical and electrical methods. It has proven to have higher cell viability than traditional microinjection, resulting in higher integration per injected embryo. The nanoinjection process can be performed on thousands of cells simultaneously using an array of microneedles that is inserted into a monolayer of cells. This thesis describes the needle array design requirements and the fabrication process …

Design And Fabrication Of Serpentine-Hinged Silicon Micro-Mirror Devices, Nicholas Wiswell

Materials Engineering

Seven different actuating micro-mirror designs were created and verified via finite element analysis. Two were straight torsion beam hinge designs representative of previous work at Cal Poly; the remaining five were new designs incorporating serpentine hinges. The surface area of these mirror devices ranged from 0.5 square millimeters to 12.5 square millimeters. Geometric patterns representing the device profiles were created and used to obtain photolithographic masks. Beginning with a 400μm thick, 100mm diameter silicon on insulator wafer, a silicon dioxide layer was thermally grown on the surface at 1050 degrees Celsius. Positive photoresist was then spun onto the wafer at …

Fabrication And Characterization Of Torsional Micro-Hinge Structures, Mike Madrid Marrujo

Master's Theses

ABSTRACT

Fabrication and Characterization of Torsional Micro-Hinge Structures

Mike Marrujo

There are many electronic devices that operate on the micrometer-scale such as Digital Micro-Mirror Devices (DMD). Micro actuators are a common type of DMD that employ a diaphragm supported by torsional hinges, which deform during actuation and are critical for the devices to have high stability and reliability. The stress developed within the hinge during actuation controls how the actuator will respond to the actuating force. Electrostatically driven micro actuators observe to have a fully recoverable non-linear viscoelastic response. The device consists of a micro-hinge which is suspended by two …

Mechanical Properties And Mems Applications Of Carbon-Infiltrated Carbon Nanotube Forests, Walter C. Fazio

Theses and Dissertations

This work explores the use of carbon-infiltrated carbon nanotube (CI-CNT) forests as a material for fabricating compliant MEMS devices. The impacts of iron catalyst layer thickness and carbon infiltration time are examined. An iron layer of 7nm or 10nm with an infiltration time of 30 minutes produces CI-CNT best suited for compliant applications. Average maximum strains of 2% and 2.48% were observed for these parameters. The corresponding elastic moduli were 5.4 GPa and 4.1 GPa, respectively. A direct comparison of similar geometry suggested CI-CNT is 80% more flexible than single-crystal silicon. A torsional testing procedure provided an initial shear modulus …

3-Dimensional Intracortical Neural Interface For The Study Of Epilepsy, Jessin Koshy John

Wayne State University Dissertations

Epilepsy is a chronic disease characterized by recurrent, unprovoked seizures, where seizures are described as storms of uncontrollable neuro-electrical activity within the brain. Seizures are therefore identified by observation of electrical spiking observed through electrical contacts (electrodes) placed on the scalp or the cortex above the epileptic regions. Current epilepsy research is identifying several specific molecular markers that appear at specific layers of the epilepsy-affected cortex. However, technology is limited in allowing for live observation of electrical spiking across these layers. The underlying hypothesis of this project is that electrical interictal activity is generated in a layer- and lateral-specific pattern. …

Low Loss Vhf And Uhf Filters For Wireless Communications Based On Piezoelectrically-Transduced Micromechanical Resonators, Julio Mario Dewdney

USF Tampa Graduate Theses and Dissertations

For the past decade, a great deal of research has been focused towards developing a viable on-chip solution to replace the current state-of-the-art VHF and UHF filters based on SAW and FBAR technologies. Although filters based on SAW and FBAR devices are capable of fulfilling the basic requirements needed for IF and RF bandpass filtering and reference signal generation, an alternative solution that can enable the next generation of multi-frequency and multi-mode transceivers while enabling size and price reduction by allowing the manufacturing of single-chip monolithic RF transceivers is highly desired. In response to these new needs, piezoelectrically-transduced micromechanical filters …

Pdms Based Waveguides For Microfluidics And Eocb, Weiping Qiu

LSU Master's Theses

Due to the low cost, fast and ease of molding, PDMS has become one of the most popular materials for microfluidics devices, bioMEMS applications. Meanwhile, the integration of different functional components on to one single chip (or Lab on a Chip) is the dream for many scientists and engineers in the related area. In addition to the necessary mechanical components for accommodating the reactions, such as pumps, valves, mixers and so on, optical components such as waveguides, lens, interferers are all desired to be lumped into such a system.

The waveguide for such a system requires the material to have …