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Simulation And Fabrication Of Three Novel Micromechanical Sensors, Yanqing Lu

Doctoral Dissertations

This work focuses on the simulation, fabrication and characterization of novel microdevices for chemical and biological sensors for improved sensitivity, enhanced performance and applicability. Specifically, microbridge and microcoil sensors have been fabricated via advanced microfabrication technologies. Due to the potential application in chemical and biological sensing, the growth of gold and platinum nanowires during an electrolysis process have also been investigated.

A microbridge can be considered as the head-to-head fusion of two cantilevers and the middle of the bridge would deform in a way similar to a microcantilever. The microbridge sensing device is more stable than the microcantilever, especially in …