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Tantalum Silicide Variable Capacitance Rotary Micromotors : Design And Fabrication, Michael Steven Berry

Theses

Tantalum silicide was studied as an alternative microelectromechanical material by fabricating a rotary micromotor utilizing a proven design. This material was used for the rotor, stators, and bearing over a silicon substrate. It has the attraction of potentially reducing the friction which is a major problem with polysilicon-to-polysilicon bearings.

The necessity of high aspect ratio features required that a plasma or reactive ion etch with a high degree of anisotropy be developed to etch tantalum silicide films in excess of 1.5μm. A sulfur hexafluoride/Freon 115 plasma provided the necessary process control during the etches. The stress present in annealed tantalum …