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Optimization Of A 3-Micron Bccd Process For High Density Ccd Registers, Mark Ratner

Theses

In July 1991, Dr. Walter F. Kosonocky proposed a High-Frame-Rate-CCD Imager. The design of the imager is such that the CCD channel width be 3-microns and capable of handling at least 3000 - 5000 electrons per square micron. Using process (SUPREM III) and device (PISCES IIB) simulations, charge handling capacities as a function of implant energy and junction depth were studied. Arsenic implants ranging from 100 to 200keV were driven-in to obtain junction depths between 0.40µm and 0.80µm. As a result of this work it was determined that charge handling capacities as high as 9400 electrons/µm² were achievable with …