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Growth Of Zno Thin Films On Polar Oxide Surfaces By Atomic Layer Deposition, Kallol Pradhan

Theses and Dissertations

Polar heterointerfaces of MgO(111) and the II-VI semiconductor ZnO are of technological interest for transparent conducting electrode applications. Growth and structure of thin films on polar surfaces can be different than on non-polar surfaces due to the large surface energy of polar surfaces. We have grown ZnO on unreconstructed MgO(111)-(1x1)-OH terminated and reconstructed MgO(111)-(√3x√3)R30° polar oxide surfaces using atomic layer deposition. A homemade UHV-interfaced viscous-flow atomic layer deposition (ALD) reactor with in-situ quartz crystal monitor was used to grow ZnO thin films on the MgO(111) substrates. Surface morphology studies revealed that the surface roughness increases with ZnO film thickness and …