Open Access. Powered by Scholars. Published by Universities.®

Engineering Commons™

Open Access. Powered by Scholars. Published by Universities.®

Selected Works

2013

Resonator

Articles 1 - 6 of 6

Full-Text Articles in Engineering

Scalar Differential Equation For Slowly-Varying Thickness-Shear Modes In At-Cut Quartz Resonators With Surface Impedance For Acoustic Wave Sensor Application.Pdf, Huijing He Oct 2013

Scalar Differential Equation For Slowly-Varying Thickness-Shear Modes In At-Cut Quartz Resonators With Surface Impedance For Acoustic Wave Sensor Application.Pdf, Huijing He

Huijing He

For time-harmonic motions, we generalize a 2-D scalar differential equation derived previously by Tiersten
for slowly-varying thickness-shear vibrations of AT-cut quartz resonators. The purpose of the generalization is to include the effects of surface acoustic impedance from, e.g., mass layers or fluids for sensor applications. In addition to the variation of fields along the plate thickness, which is considered in the usual 1-D acoustic wave sensor models, the equation obtained also describes in-plane variations of the fields, and therefore can be used to study the vibrations of finite plate sensors with edge effects. The equation is compared with the theory …

Go to article

Mems Resonant Magnetic Field Sensor Based On An Aln/Fegab Bilayer Nano-Plate Resonator, Yu Hui, Tianxiang Nan, Nian Sun, Matteo Rinaldi Aug 2013

Mems Resonant Magnetic Field Sensor Based On An Aln/Fegab Bilayer Nano-Plate Resonator, Yu Hui, Tianxiang Nan, Nian Sun, Matteo Rinaldi

Nian X. Sun

This paper reports on the first demonstration of an ultra-miniaturized, high frequency (215 MHz) and high sensitivity MEMS resonant magnetic field sensor based on an AlN/FeGaB bilayer nano-plate resonator capable of detecting magnetic field at nano-Tesla level. Despite of the reduced volume and the high operating frequency of the sensor, high electromechanical performances were achieved (quality factor Q ≈ 511 and electromechanical coupling coefficient kt² ≈ 1.63%). This first prototype was characterized for different magnetic field levels from 0 to 152 Oe showing a frequency sensitivity of ~ 1 Hz/nT and a limit of detection of ~ 10 nT.

Go to article

Mems Resonant Magnetic Field Sensor Based On An Aln/Fegab Bilayer Nano-Plate Resonator, Yu Hui, Tianxiang Nan, Nian Sun, Matteo Rinaldi Mar 2013

Mems Resonant Magnetic Field Sensor Based On An Aln/Fegab Bilayer Nano-Plate Resonator, Yu Hui, Tianxiang Nan, Nian Sun, Matteo Rinaldi

Tianxiang Nan

This paper reports on the first demonstration of an ultra-miniaturized, high frequency (215 MHz) and high sensitivity MEMS resonant magnetic field sensor based on an AlN/FeGaB bilayer nano-plate resonator capable of detecting magnetic field at nano-Tesla level. Despite of the reduced volume and the high operating frequency of the sensor, high electromechanical performances were achieved (quality factor Q ≈ 511 and electromechanical coupling coefficient kt² ≈ 1.63%). This first prototype was characterized for different magnetic field levels from 0 to 152 Oe showing a frequency sensitivity of ~ 1 Hz/nT and a limit of detection of ~ 10 nT.

Go to article

Mems Resonant Magnetic Field Sensor Based On An Aln/Fegab Bilayer Nano-Plate Resonator, Yu Hui, Tianxiang Nan, Nian Sun, Matteo Rinaldi Feb 2013

Mems Resonant Magnetic Field Sensor Based On An Aln/Fegab Bilayer Nano-Plate Resonator, Yu Hui, Tianxiang Nan, Nian Sun, Matteo Rinaldi

Matteo Rinaldi

This paper reports on the first demonstration of an ultra-miniaturized, high frequency (215 MHz) and high sensitivity MEMS resonant magnetic field sensor based on an AlN/FeGaB bilayer nano-plate resonator capable of detecting magnetic field at nano-Tesla level. Despite of the reduced volume and the high operating frequency of the sensor, high electromechanical performances were achieved (quality factor Q ≈ 511 and electromechanical coupling coefficient kt² ≈ 1.63%). This first prototype was characterized for different magnetic field levels from 0 to 152 Oe showing a frequency sensitivity of ~ 1 Hz/nT and a limit of detection of ~ 10 nT.

Go to article

Analysis Of Electrically-Forced Vibrations Of Piezoelectric Mesa Resonators.Pdf, Huijing He, Guoquan Nie, Jinxi Liu, Jiashi Yang Dec 2012

Analysis Of Electrically-Forced Vibrations Of Piezoelectric Mesa Resonators.Pdf, Huijing He, Guoquan Nie, Jinxi Liu, Jiashi Yang

Huijing He

We study the electrically forced thickness-shear and thickness-twist vibrations of stepped thickness piezoelectric plate mesa resonators made of polarized ceramics or 6-mm class crystals. A theoretical analysis based on the theory of piezoelectricity is performed, and an analytical solution is obtained using the trigonometric series. The electrical admittance, resonant frequencies, and mode shapes are calculated, and strong energy trapping of the modes is observed. Their dependence on the geometric parameters of the resonator is also examined.

Go to article

Effects Of Mode Coupling On The Admittance Of An At-Cut Quartz Thickness-Shear Resonator.Pdf, Huijing He Dec 2012

Effects Of Mode Coupling On The Admittance Of An At-Cut Quartz Thickness-Shear Resonator.Pdf, Huijing He

Huijing He

We study the effects of couplings to flexure and face-shear modes on the admittance of an AT-cut quartz plate
thickness-shear mode resonator. Mindlin’s two-dimensional equations for piezoelectric plates are employed. Electrically forced vibration solutions are obtained for three cases: pure thickness-shear mode alone; two coupled modes of thickness shear and flexure; and three coupled modes of thickness shear, flexure, and face shear. Admittance is calculated and its dependence on the driving frequency and the length/thickness ratio of the resonator is examined. Results show that near the thickness-shear resonance, admittance assumes maxima, and that for certain values of the length/thickness ratio, …

Go to article