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Plasma-Enhanced Chemical Vapour Deposition On Particles In An Atmospheric Circulating Fluidized Bed, J. Ruud Van Ommen, Elena Abadjieva, Yves L.M. Creyghton
Plasma-Enhanced Chemical Vapour Deposition On Particles In An Atmospheric Circulating Fluidized Bed, J. Ruud Van Ommen, Elena Abadjieva, Yves L.M. Creyghton
The 13th International Conference on Fluidization - New Paradigm in Fluidization Engineering
Plasma-enhanced chemical vapour deposition is an attractive technqiue to provide particles with a thin film. Applying a cold plasma enables us to work with temperature-sensitive materials. Using a CFB with an incorporated volume dielectric barrier discharge reactor we coated 20-30 m CuO particles with a thin SiOx layer.