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Low Temperature Nitife Shape Memory Alloys: Actuator Engineering And Investigation Of Deformation Mechanisms Using In Situ Neutr, Vinu Krishnan
Low Temperature Nitife Shape Memory Alloys: Actuator Engineering And Investigation Of Deformation Mechanisms Using In Situ Neutr, Vinu Krishnan
Electronic Theses and Dissertations
Shape memory alloys are incorporated as actuator elements due to their inherent ability to sense a change in temperature and actuate against external loads by undergoing a shape change as a result of a temperature-induced phase transformation. The cubic so-called austenite to the trigonal so-called R-phase transformation in NiTiFe shape memory alloys offers a practical temperature range for actuator operation at low temperatures, as it exhibits a narrow temperature-hysteresis with a desirable fatigue response. Overall, this work is an investigation of selected science and engineering aspects of low temperature NiTiFe shape memory alloys. The scientific study was performed using in …
Process Development For The Fabrication Of Mesoscale Electrostatic Valve Assembly, Shailini Rajiv Dhru
Process Development For The Fabrication Of Mesoscale Electrostatic Valve Assembly, Shailini Rajiv Dhru
Electronic Theses and Dissertations
This study concentrates on two of the main processes involved in the fabrication of electrostatic valve assembly, thick resist photolithography and wet chemical etching of a polyamide film. The electrostatic valve has different orifice diameters of 25, 50, 75 and 100 µm. These orifice holes are to be etched in the silicon wafer with deep reactive ion etching. The photolithography process is developed to build a mask of 15 µm thick resist pattern on silicon wafer. This photo layer acts as a mask for deep reactive ion etching. Wet chemical etching process is developed to etch kapton polyamide film. This …