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Development Of Piezoelectric Sensors And Methodology For Noninvasive Simultaneous Detection Of Multiple Vital Signs, Areen Abdallah Romi Allataifeh
Development Of Piezoelectric Sensors And Methodology For Noninvasive Simultaneous Detection Of Multiple Vital Signs, Areen Abdallah Romi Allataifeh
Dissertations
The activity of piezoelectric material linked the applied electric field with the strain generated that can be translated into geometrical variations. Flexible steel substrate exhibits fascinating mechanical properties which enable their integration into the emerging field of flexible microelectronics. This work presents an extended technique based on capacitance-voltage dependency to extract the geometrical variations in thin-film piezoelectric materials deposited on a flexible steel. A 50 μm flexible steel sheet has been sandwiched by two PZT film layers, each of 2.4 μm in thickness deposited by sputtering. An aluminum layer of 370 nm has been deposited above each PZT layer to …