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A Mems Pressure Sensor Using Electrostatic Levitation, Mohammad Mousavi, Mohammad Alzgool, Shahrzad Towfighian
A Mems Pressure Sensor Using Electrostatic Levitation, Mohammad Mousavi, Mohammad Alzgool, Shahrzad Towfighian
Mechanical Engineering Faculty Scholarship
Applying electrostatic levitation force to the initially-closed gap-closing electrodes of our micro-electro- mechanical system (MEMS) creates multi actuation mechanisms, and opens a new world to the MEMS applications.
Electrostatic levitation allows us to measure physical quantities, such as air pressure, by exploiting pull-in instability and releasing. The beam starts from a pulled-in position by applying a voltage difference between two gap-closing electrodes. When enough voltage is applied to the side electrodes, the cantilever beam is released. At the release instant, electrostatic forces, restoring force, and surface force are applied to the cantilever. According to the experimental results of this work, …
Autonomous Shock Sensing Using Bi-Stable Triboelectric Generators And Mems Electrostatic Levitation Actuators, Mohammad Mousavi, Mohammad Alzgool, Shahrzad Towfighian
Autonomous Shock Sensing Using Bi-Stable Triboelectric Generators And Mems Electrostatic Levitation Actuators, Mohammad Mousavi, Mohammad Alzgool, Shahrzad Towfighian
Mechanical Engineering Faculty Scholarship
This work presents an automatic threshold shock-sensing trigger system that consists of a bi-stable triboelectric transducer and a levitation-based electrostatic mechanism. The bi-stable mechanism is sensitive to mechanical shocks and releases impact energy when the shock is strong enough. A triboelectric generator produces voltage when it receives a mechanical shock. The voltage is proportional to the mechanical shock. When the voltage exceed a certain level, the initially pulled-in Microelectromechanical system (MEMS) switch is opened and can disconnect the current in a safety electronic system. The MEMS switch combines two mechanisms of gap-closing (parallel-plate electrodes) with electrostatic levitation (side electrodes) to …