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Chip To Chip Optical Interconnection Using Mems Mirrors, Tod V. Laurvick
Chip To Chip Optical Interconnection Using Mems Mirrors, Tod V. Laurvick
Theses and Dissertations
This experiment explores the use of MEMS mirrors to direct subsurface optical signals to another device and reception of those signals for use in chip to chip communications. Devices were built in PolyMUMPs to control horizontal and vertical beam direction and tilting in the outgoing signal and MEMS beam splitters for the incoming signal. Several elements of the outgoing beam path were successful and those which needed improvement indicate a high probability of success with limited trials needed and currently successful design elements could still be improved within the scope of PolyMUMPs. The incoming beam path elements were not successful …
Power-Scavenging Mems Robots, Daniel J. Denninghoff
Power-Scavenging Mems Robots, Daniel J. Denninghoff
Theses and Dissertations
This thesis includes the design, modeling, and testing of novel, power-scavenging, biologically inspired MEMS microrobots. Over one hundred 500-μm and 990-μm microrobots with two, four, and eight wings were designed, fabricated, characterized. These microrobots constitute the smallest documented attempt at powered flight. Each microrobot wing is comprised of downward-deflecting, laser-powered thermal actuators made of gold and polysilicon; the microrobots were fabricated in PolyMUMPs® (Polysilicon Multi-User MEMS Processes). Characterization results of the microrobots illustrate how wing-tip deflection can be maximized by optimizing the gold-topolysilicon ratio as well as the dimensions of the actuator-wings. From these results, an optimum actuator-wing configuration was …