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Design, Fabrication And Characterization Of Micro Opto-Electro-Mechanical Systems, Darren E. Sene
Design, Fabrication And Characterization Of Micro Opto-Electro-Mechanical Systems, Darren E. Sene
Theses and Dissertations
Several micro-opto-electro-mechanical structures were designed using the Multi-User MEMS Process (MUMPS). Specific design techniques were investigated for improving the capabilities of elevating flip up structures. The integration of several flip up microoptical structures into a microoptical system was explored with emphasis on the development of a microinterferometer. The thermal effects on the Modulus of Elasticity were determined by detecting the resonant frequency for a square Flexure Beam Micromirror Device. The resonance of the device was found to match theory to within 0.1 % and the Modulus of Elasticity was found to decrease by 0.041 GPa/K from 290 to 450 K. …
Design And Fabrication Of A Micromechanical Gyroscope, Richard M. Kuhns
Design And Fabrication Of A Micromechanical Gyroscope, Richard M. Kuhns
Theses and Dissertations
Both size and cost of mechanical and optical inertial navigation systems (INS) have prevented their use in many applications. By developing a micromachined gyroscope and combining it with existing micromachined accelerometer designs to form a low sensitivity INS, the cost would be reduced by a factor of 10 or more. The lower per unit cost would open new areas for INS use. A second advantage of the micromachined INS would be its size. A micromachined INS would weigh only a few ounces and take significantly less space, allowing more room for electronics and the weight reduction would lead to longer …