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Full-Text Articles in Engineering
Low-Temperature Fabrication Process For Integrated High-Aspect Ratio Metal Oxide Nanostructure Semiconductor Gas Sensors, William Paul Clavijo
Low-Temperature Fabrication Process For Integrated High-Aspect Ratio Metal Oxide Nanostructure Semiconductor Gas Sensors, William Paul Clavijo
Theses and Dissertations
This work presents a new low-temperature fabrication process of metal oxide nanostructures that allows high-aspect ratio zinc oxide (ZnO) and titanium dioxide (TiO2) nanowires and nanotubes to be readily integrated with microelectronic devices for sensor applications. This process relies on a new method of forming a close-packed array of self-assembled high-aspect-ratio nanopores in an anodized aluminum oxide (AAO) template in a thin (2.5 µm) aluminum film deposited on a silicon and lithium niobate substrate (LiNbO3). This technique is in sharp contrast to traditional free-standing thick film methods and the use of an integrated thin aluminum film …
Nanowire Zinc Oxide Mosfet Pressure Sensor, William Clavijo
Nanowire Zinc Oxide Mosfet Pressure Sensor, William Clavijo
Theses and Dissertations
Fabrication and characterization of a new kind of pressure sensor using self-assembly Zinc Oxide (ZnO) nanowires on top of the gate of a Metal-Oxide-Semiconductor Field-Effect Transistor (MOSFET) is presented. Self-assembly ZnO nanowires were fabricated with a diameter of 80 nm and 800 nm height (80:8 aspect ratio) on top of the gate of the MOSFET. The sensor showed a 110% response in the drain current due to pressure, even with the expected piezoresistive response of the silicon device removed from the measurement. The pressure sensor was fabricated through low temperature bottom up ultrahigh aspect ratio ZnO nanowire growth using anodic …
Multifunctional Orthogonally-Frequency-Coded Saw Strain Sensor, William Wilson
Multifunctional Orthogonally-Frequency-Coded Saw Strain Sensor, William Wilson
Theses and Dissertations
A multifunctional strain sensor based on Surface Acoustic Wave (SAW) Orthogonal Frequency Coding (OFC) technology on a Langasite substrate has been investigated. Second order transmission matrix models have been developed and verified. A new parameterizable library of SAW components was created to automate the layout process. Using these new tools, a SAW strain sensor with OFC reflectors was designed, fabricated and tested. The Langasite coefficients of velocity for strain (γS = 1.699) and Temperature (γT = 2.562) were experimentally determined. The strain and temperature characterization of this strain sensor, along with the coefficients of velocity, have been used to demonstrate …