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New Specimen Design For Studying The Growth Of Small Fatigue Cracks With Surface Acoustic Waves, Blair London
New Specimen Design For Studying The Growth Of Small Fatigue Cracks With Surface Acoustic Waves, Blair London
Materials Engineering
The study of small surface fatigue cracks in AISI 4140 quenched and tempered steel by a nondestructive surface acoustic wave technique is summarized. A novel cantilevered bending, plate-type fatigue specimen is described that is compatible with the acoustic method. Small cracks are initiated from a 25-μm deep surface pit produced by an electrospark machine. The importance of studying these
Applications Of Optical Emission Spectroscopy To Semiconductor Processing, Richard N. Savage, John G. Shabushnig, Paul R. Demko
Applications Of Optical Emission Spectroscopy To Semiconductor Processing, Richard N. Savage, John G. Shabushnig, Paul R. Demko
Materials Engineering
Optical emission spectroscopy (OES) has proven to be a valuable tool in the developmrent and production of state-of-the-art semiconductor devices. Application to the plasma etching of a variety of materials necessary for integrated circuit fabrication is discussed, with particular emphasis placed on etch endpoint analysis. The utility of OES techniques in monitoring photolithographic processes is also presented.