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Design, Fabrication And Characterization Of Micro Opto-Electro-Mechanical Systems, Darren E. Sene
Design, Fabrication And Characterization Of Micro Opto-Electro-Mechanical Systems, Darren E. Sene
Theses and Dissertations
Several micro-opto-electro-mechanical structures were designed using the Multi-User MEMS Process (MUMPS). Specific design techniques were investigated for improving the capabilities of elevating flip up structures. The integration of several flip up microoptical structures into a microoptical system was explored with emphasis on the development of a microinterferometer. The thermal effects on the Modulus of Elasticity were determined by detecting the resonant frequency for a square Flexure Beam Micromirror Device. The resonance of the device was found to match theory to within 0.1 % and the Modulus of Elasticity was found to decrease by 0.041 GPa/K from 290 to 450 K. …