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An Investigation On The Interface Corrosion Behaviors Of Cobalt Interconnects In Chemical Mechanical Polishing Slurry, Kai-Xuan Qin, Peng-Fei Chang, Yu-Lin Huang, Ming Li, Tao Hang
An Investigation On The Interface Corrosion Behaviors Of Cobalt Interconnects In Chemical Mechanical Polishing Slurry, Kai-Xuan Qin, Peng-Fei Chang, Yu-Lin Huang, Ming Li, Tao Hang
Journal of Electrochemistry
Cobalt is widely regarded as the most promising interconnect material for 10 nm node and beyond. The development of a chemical mechanical planarization (CMP) slurry suitable for cobalt interconnect is a critical component for the application of cobalt interconnect. During CMP process of the interconnect layer, the achievement of high-quality surface after planarization is greatly challenged by the metal corrosion in CMP slurry. In this contribution, the corrosion behavior of cobalt in a slurry with potassium persulfate (KPS) as an oxidizer, glycine as a complexing agent, and benzotriazole (BTA) as an inhibitor was investigated. Static erosion rates (SER) of cobalt …
Corrosion Protection Mechanisms Of Trivalent Chromium Based Passivations On Γ-Znni Coated Al6061-T6 Alloy, Kevin Foster
Corrosion Protection Mechanisms Of Trivalent Chromium Based Passivations On Γ-Znni Coated Al6061-T6 Alloy, Kevin Foster
Doctoral Dissertations
“The role of cobalt in trivalent chromium passivations (TCPs) to improve corrosion resistance of γ-ZnNi coated steel and aluminum is based on its effect on hexavalent chromium content in the passive layer. Investigations of both a cobalt-containing and cobalt-free TCP on SAE 1008 steel indicated that both passivations protect well for up to 1000 hours in neutral salt spray exposure (SSE). A repetition on Al 6061-T6 alloy indicated that TCP performed much better than cobalt-free TCP implicating the underlying substrate. Optical and electron micrographs indicated physical changes such as crack thickness, crack density, passivation porosity, and passivation thickness existed between …