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Structures And Techniques For Implementing And Packaging Complex, Large Scale Microelectromechanical Systems Using Foundry Fabrication Processes, John H. Comtois

Theses and Dissertations

Microelectromechanical Systems, or 'MEMS' is a broad new field of research into devices that range in size from a few microns to a few millimeters. Much of the technology supporting MEMS research is borrowed from the microelectronics industry; so MEMS holds out the promise of batch fabrication of microminiaturized machines that can be easily integrated with electronics. This dissertation research investigated structures and methods for implementing and packaging complex, large scale microelectromechanical devices and systems using commercially available foundry fabrication processes. It specifies methods for creating and packaging large, complex MEM systems, allowing the exploration of new MEMS architectures at …