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A Precision Instrument For Research Into Nanolithographic Techniques Using Field-Emitted Electron Beams, King-Fu Hii
A Precision Instrument For Research Into Nanolithographic Techniques Using Field-Emitted Electron Beams, King-Fu Hii
University of Kentucky Doctoral Dissertations
Nanomanufacturing is an active research area in academia and industry due to the ever-growing demands for precision surface modifications of thin films or substrates with nanoscale features. Conventional lithographic techniques face many challenges as they approach their fundamental limits. Consequently, new nanomanufacturing tools, fabrication techniques, and precision instruments are being explored and developed to meet these challenges. It has been hypothesized that direct-write nanolithography might be achieved by using a field-emitted electron beam for nanomachining. This dissertation moves this research one step closer by developing a precision instrument that can enable the integration of direct-write nanolithography by a field-emitted electron …