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Stretchable Piezoelectric Power Generators Based On Zno Thin Films On Elastic Substrates, Ioana Voiculescu, Fang Li, Glen Kowach, Nicolas Mistou, Russell Kastberg
Stretchable Piezoelectric Power Generators Based On Zno Thin Films On Elastic Substrates, Ioana Voiculescu, Fang Li, Glen Kowach, Nicolas Mistou, Russell Kastberg
Publications and Research
The paper describes a stretchable, microfabricated power generator that will be attached on the skin and will produce energy based on the movements of the human body. The device was fabricated on a polymeric, elastomeric, poly(dimethylsiloxane) (PDMS) sheet. It consists of a piezoelectric thin film of ZnO sandwiched between two stretchable gold electrodes. An innovative technique was used for the deposition of ZnO thin film on the gold electrode-coated polymeric substrate at low temperatures below 150C. This is the first attempt to use a uniform film of ZnO, for energy harvesting. The ZnO film had the thickness at the submicron …