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Development Of Micropump For Microfluidic Applications, Dong Eun Lee
Development Of Micropump For Microfluidic Applications, Dong Eun Lee
LSU Doctoral Dissertations
This dissertation covers the research work on two types of micropumps, one is based on magnetohydrodynamic (MHD) principle that utilizes Lorentz force for actuation, and the other is based on electrochemical actuation. The AC-type MHD micropump was designed and analyzed as a solution to the bubble formation problem encountered in DC-type MHD micropump. A UV-LIGA process using thick layer of SU-8 negative photoresist was successfully developed to microfabricate the AC MHD micropump. Preliminary studies and tests of the AC MHD micropumps demonstrate that bubble formation was significantly reduced to permit the proper function of the micropump. A continuous flow was …