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Casimir Effect On Amplitude-Frequency Response Of Parametric Resonance Of Electrostatically Actuated Nems Cantilever Resonators, Dumitru Caruntu, Christian A. Reyes
Casimir Effect On Amplitude-Frequency Response Of Parametric Resonance Of Electrostatically Actuated Nems Cantilever Resonators, Dumitru Caruntu, Christian A. Reyes
Mechanical Engineering Faculty Publications and Presentations
This paper deals with the effect of Casimir force on the amplitudefrequency response of parametric resonance of electrostatically actuated nanoresonators. The resonator is actuated by using an electrostatic force to include a f irst order fringe correction. Casimir force and viscous damping force are included in the model, as well. Both electrostatic and Casimir forces are nonlinear. The behavior of the resonator is investigated using two methods, the Method of Multiple Scales (MMS) for a Reduced Order Model (ROM) using one mode of vibration, and numerical integration of ROMs using up to five modes of vibration. ROM is based on …