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Direct Energy Deposition Of Mo Powder Prepared By Electrode Induction Melting Gas Atomization, Goo Won Roh, Eun Soo Park, Jaeyun Moon, Hojun Lee, Jongmin Byun

Mechanical Engineering Faculty Research

Molybdenum (Mo) is used to form a barrier layer for metal wiring in displays or semiconductor devices. Recently, researches have been continuously attempted to fabricate Mo sputtering targets through additive manufacturing. in this study, spherical Mo powders with an average particle size of about 37 um were manufactured by electrode induction melting gas atomization. Subsequently, Mo layer with a thickness of 0.25 mm was formed by direct energy deposition in which the scan speed was set as a variable. According to the change of the scan speed, pores or cracks were found in the Mo deposition layer. Mo layer deposited …