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Analytical Modeling Of A Novel High-Q Disk Resonator For Liquid-Phase Applications, Mohomad S. Sotoudegan, Stephen M. Heinrich, Fabien Josse, Nicholas J. Nigro, Isabelle Dufour, Oliver Brand

Civil and Environmental Engineering Faculty Research and Publications

To overcome the detrimental effects of liquid environments on microelectromechanical systems resonator performance, the in-fluid vibration of a novel disk resonator supported by two electrothermally driven legs is investigated through analytical modeling and the effects of the system’s geometric/material parameters on the dynamic response are explored. The all-shear interaction device (ASID) is based on engaging the surrounding fluid primarily through shearing action. The theory comprises a continuous-system, multimodal model, and a single-degree-of-freedom model, the latter yielding simple formulas for the fundamental-mode resonant characteristics that often furnish excellent estimates to the results based on the more general model. Comparisons between theoretical …