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Photonic Band Tuning In 2d Photonic Crystals By Atomic Layer Deposition, Elton Graugnard, Davy P. Gaillot, Simon N. Dunham, Curtis W. Neff, Tsuyoshi Yamashita, Christopher J. Summers
Photonic Band Tuning In 2d Photonic Crystals By Atomic Layer Deposition, Elton Graugnard, Davy P. Gaillot, Simon N. Dunham, Curtis W. Neff, Tsuyoshi Yamashita, Christopher J. Summers
Materials Science and Engineering Faculty Publications and Presentations
Atomic layer deposition (ALD) has become a powerful tool for the fabrication of high quality 3-dimentional photonic crystals (PCs) from both inorganic (opal) and organic (holographically patterned polymer) templates [1,2]. With ALD, highly conformal films can be grown with a precision of 0.05 nm, which, when combined with the availability of a wide range of low temperature film growth protocols, enables a high degree of control over material and structural properties to precisely tune optical properties [3]. Two-dimensional photonic crystals have been developed extensively for applications in optical interconnects, beam steering, and sensor devices; and are predominantly fabricated by electron-beam …