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Materials Science and Engineering

Chapman University

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Microwave Plasma Chemical Vapor Deposition

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Full-Text Articles in Engineering

Designing & Building A Microwave Plasma Reactor For Graphene Synthesis, Aviv Zohman, Jerry Larue May 2022

Designing & Building A Microwave Plasma Reactor For Graphene Synthesis, Aviv Zohman, Jerry Larue

Student Scholar Symposium Abstracts and Posters

Graphene’s remarkable electrical, optical, and chemical properties make it a promising successor to indium tin oxide for applications in flexible, transparent electronics. However, efforts to manufacture graphene have been hindered by inefficient synthesis and transfer methods. Chemical vapor deposition (CVD) is commonly used to produce graphene. CVD starts with a blank surface onto which a chemical vapor is deposited to create a single graphene layer. CVD requires extreme temperatures, so only substrates with high melting points are applicable, like metals. This excludes insulative substrates such as polymers which are essential to transparent and flexible devices. Therefore, a subsequent process transfers …