Engineering Commons^™

Process Development For The Formation Of Post-Bonding Biorecognition Layers In Microfluidic Biosensors, Martin G. Perez, Phaninder R. Kanikella, James N. Reck, Chang-Soo Kim, Matthew O'Keefe

Electrical and Computer Engineering Faculty Research & Creative Works

Formation of the biorecognition layers within microfluidic sensor channels must be done after the completion of the channel structure since these layers cannot withstand the wafer bonding temperature. We propose a new post-bonding immobilization process to prepare the enzyme layers within microfluidic channels of electrochemical biosensors. An array of Pt vertical electrodes is electroplated using a SU-8 mold. The cured SU-8 is then removed by plasma etching to expose the Pt electrode and to define the fluidic channel cavity simultaneously. An array of enzyme posts is formed on the Pt surface by either electropolymerizing or photopolymerizing enzyme precursor solutions injected …