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Iii-V Nitride Based Microcantilever Heaters For Unique Multimodal Detection Of Volatile Organic Compounds At Low Temperature, Ifat Jahangir

Theses and Dissertations

Detection of volatile organic compounds (VOCs), which are widely used in industrial processes and household products, is very important due to significant health hazards associated with them. VOCs are commonly detected using photo-ionization detectors (PIDs), suspended hot bead pellistors, or heated metal oxide semiconductor functionalization layers. However, these techniques used for detecting VOCs often suffer from one or more of the following issues - high power consumption, limited selectivity, complicated functionalization technique and expensive characterization tools. On the other hand, microcantilevers offer excellent avenues for molecular sensing that arises out of their high sensitivity to various physical parameter changes induced …