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Investigation Of Reactively Sputtered Boron Carbon Nitride Thin Films, Vinit O. Todi
Investigation Of Reactively Sputtered Boron Carbon Nitride Thin Films, Vinit O. Todi
Electronic Theses and Dissertations
Research efforts have been focused in the development of hard and wear resistant coatings over the last few decades. These protective coatings find applications in the industry such as cutting tools, automobile and machine part etc. Various ceramic thin films like TiN, TiAlN, TiC, SiC and diamond-like carbon (DLC) are examples of the films used in above applications. However, increasing technological and industrial demands request thin films with more complicated and advanced properties. For this purpose, B-C-N ternary system which is based on carbon, boron and nitrogen which exhibit exceptional properties and attract much attention from mechanical, optical and electronic …
Diamond Based-Materials: Synthesis, Characterization And Applications, Qiang Hu
Diamond Based-Materials: Synthesis, Characterization And Applications, Qiang Hu
USF Tampa Graduate Theses and Dissertations
The studies covered in this dissertation concentrate on the various forms of diamond films synthesized by chemical vapor deposition (CVD) method, including microwave CVD and hot filament CVD. According to crystallinity and grain size, a variety of diamond forms primarily including microcrystalline (most commonly referred to as polycrystalline) and nanocrystalline diamond films, diamond-like carbon (DLC) films were successfully synthesized. The as-grown diamond films were optimized by changing deposition pressure, volume of reactant gas hydrogen (H2) and carrier gas argon (Ar) in order to get high-quality diamond films with a smooth surface, low roughness, preferred growth orientation and high sp3 bond …