Engineering Commons^™

Integrated Electrostatically- And Piezoelectrically-Transduced Contour-Mode Mems Resonator On Silicon-On-Insulator (Soi) Wafer, I-Tsang Wu

USF Tampa Graduate Theses and Dissertations

Due to the recent rapid growth in personal mobile communication devices (smartphones, PDA's, tablets, etc.), the wireless market is always looking for new ways to further miniaturize the RF front-ends while reducing the cost and power consumption. For many years, wireless transceivers and subsystems have been relying on high quality factor (Q) passives (e.g., quartz crystal, ceramics) to implement oscillators, filters, and other key RF front-end circuitry elements. However, these off-chip discrete components occupy large chip area and require power-demanding interfacing circuits. As a result, a great deal of research effort has been devoted to the development of …