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Growth And Characterization Of Gallium Oxide Thin Films And Devices, Jorge Castillo
Growth And Characterization Of Gallium Oxide Thin Films And Devices, Jorge Castillo
Theses and Dissertations
Gallium oxide has promising physical and electrical properties for power applications and optoelectronics. thermally grown oxide developed from sputtered GaN layers and gallium oxide substrates will be characterized. The study will evaluate a variety of temperatures in order to investigate the advantages and disadvantages on each of the synthetization techniques.
Algan/Gan Hemt By Magnetron Sputtering System, Roman Garcia Perez
Algan/Gan Hemt By Magnetron Sputtering System, Roman Garcia Perez
Theses and Dissertations
In this thesis, the growth of the semiconductor materials AlGaN and GaN is achieved by magnetron sputtering for the fabrication of High Electron Mobility Transistors (HEMTs). The study of the deposited nitrides is conducted by spectroscopy, diffraction, and submicron scale microscope methods. The preparation of the materials is performed using different parameters in terms of power, pressure, temperature, gas, and time. Silicon (Si) and Sapphire (Al2O3) wafers are used as substrates. The chemical composition and surface topography of the samples are analyzed to calculate the materials atomic percentages and to observe the devices surface. The instruments used for the semiconductors …