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Silicon As A Millimeter-Wave Monolithically Integrated Substrate - A New Look, Arye Rosen, Martin Caulton, Anna M. Gombar, Walter M. Janton, Chung P. Wu, John F. Corboy, Charles W. Magee
Silicon As A Millimeter-Wave Monolithically Integrated Substrate - A New Look, Arye Rosen, Martin Caulton, Anna M. Gombar, Walter M. Janton, Chung P. Wu, John F. Corboy, Charles W. Magee
Henry M. Rowan College of Engineering Faculty Scholarship
Materials suitable for use as monolithic substrates are summarized. A study of the properties of silicon substrates as transmission line media shows that serious consideration should be given to them for use at mm-wave frequencies. It is concluded that for silicon resistivities of 2000 ohm-cm or greater, microstrip loss in silicon at mm-wave frequencies is only slightly higher than that in GaAs or alumina. The cross section width of a transmission line represents an appreciable part of a wavelength when microstrip is used as an impedance transformer at mm-wave frequencies. Therefore, substrate thickness (using the latest dispersion characteristics) is especially …