Engineering Commons^™

Design Of Ferroelectric Mems Energy Harvesting Devices, Noah T. Blach, Robert A. Lake, Ronald A. Coutu Jr.

Electrical and Computer Engineering Faculty Research and Publications

Waste heat is a widely available but little used source of power. Converting a thermal gradient into electricity is conventionally done using the Seebeck effect, but devices that use this effect are naturally inefficient. An alternate approach uses microelectromechanical systems (MEMS) to generate movement and time-varying temperature from a constant temperature gradient. Ferroelectric materials can harvest electricity from moving structures and temperature variations. This concept was realized using traditional silicon microprocessing techniques. A silicon on insulator (SOI) wafer was backside Deep Reactive Ion Etched (DRIE) to form a one mm² by 7 micron thick silicon/silicon dioxide membrane. Lead zirconate …