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Electrical and Computer Engineering
Electrical and Computer Engineering Faculty Research and Publications
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A Novel On-Chip Three-Dimensional Micromachined Calorimeter With Fully Enclosed And Suspended Thin-Film Chamber For Thermal Characterization Of Liquid Samples, Benyamin Davaji, Hye Jeong Bak, Woo-Jin Chang, Chung-Hoon Lee
A Novel On-Chip Three-Dimensional Micromachined Calorimeter With Fully Enclosed And Suspended Thin-Film Chamber For Thermal Characterization Of Liquid Samples, Benyamin Davaji, Hye Jeong Bak, Woo-Jin Chang, Chung-Hoon Lee
Electrical and Computer Engineering Faculty Research and Publications
A microfabricated calorimeter (μ-calorimeter) with an enclosed reaction chamber is presented. The 3D micromachined reaction chamber is capable of analyzing liquid samples with volume of 200 nl. The thin film low-stress silicon nitride membrane is used to reduce thermal mass of the calorimeter and increase the sensitivity of system. The μ-calorimeter has been designed to perform DC and AC calorimetry, thermal wave analysis, and differential scanning calorimetry. The μ-calorimeter fabricated with an integrated heater and a temperature sensor on opposite sides of the reaction chamber allows to perform thermal diffusivity and specific heat measurements on liquid samples with same device. …