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Electrical and Computer Engineering
Electrical and Computer Engineering Faculty Research and Publications
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Full-Text Articles in Engineering
6.4 Ghz Acoustic Sensor For In-Situ Monitoring Of Afm Tip Wear, T.J. Cheng, Jun Hyun Han, Michael Ziwisky, Chung-Hoon Lee, S.A. Bhave
6.4 Ghz Acoustic Sensor For In-Situ Monitoring Of Afm Tip Wear, T.J. Cheng, Jun Hyun Han, Michael Ziwisky, Chung-Hoon Lee, S.A. Bhave
Electrical and Computer Engineering Faculty Research and Publications
This paper demonstrates an acoustic sensor that can resolve atomic force microscopy (AFM) tip blunting with a frequency sensitivity of 0.007%. The AFM tip is fabricated on a thin film piezoelectric aluminum nitride (AlN) membrane that is excited as a film bulk acoustic resonator (FBAR). We demonstrate that cutting 0.98 μm off of the tip apex results in a resonance frequency change of 0.4MHz at 6.387GHz. This work demonstrates the potential for in-situ monitoring of AFM tip wear.
Nano-Electromechanical Zero-Dimensional Freestanding Nanogap Actuator, Jun Hyun Han, Norimasa Yoshimizu, T.J. Cheng, Michael Ziwisky, S.A. Bhave, A. Lal, Chung-Hoon Lee
Nano-Electromechanical Zero-Dimensional Freestanding Nanogap Actuator, Jun Hyun Han, Norimasa Yoshimizu, T.J. Cheng, Michael Ziwisky, S.A. Bhave, A. Lal, Chung-Hoon Lee
Electrical and Computer Engineering Faculty Research and Publications
Micromachined free standing nanogap with metal electrodes is presented. The gap size is as small as 17 nm, and can be reduced further with electrostatic or piezoelectric actuation. The nanoscale gap is fabricated by industrial standard optical lithography and anisotropic wet chemical Si etching. Electron transport between the metal electrodes with optical stimulus enhancing photon-electron coupling (plasmon) is presented.