Open Access. Powered by Scholars. Published by Universities.®
Electrical and Computer Engineering
Electrical and Computer Engineering Faculty Research and Publications
Articles 1 - 2 of 2
Full-Text Articles in Engineering
Micro-Switches With Sputtered Au, Aupd, Au-On-Aupt, And Auptcu Alloy Electric Contacts, Ronald A. Coutu Jr., P. E. Kladitis, R. Cortez, R. E. Strawser, Robert L. Crane
Micro-Switches With Sputtered Au, Aupd, Au-On-Aupt, And Auptcu Alloy Electric Contacts, Ronald A. Coutu Jr., P. E. Kladitis, R. Cortez, R. E. Strawser, Robert L. Crane
Electrical and Computer Engineering Faculty Research and Publications
This work is the first to report on a new analytic model for predicting micro-contact resistance and the design, fabrication, and testing of microelectromechanical systems (MEMS) metal contact switches with sputtered bi-metallic (i.e. gold (Au)-on-Au-platinum (Pt), (Au-on-Au-(6%)Pt)), binary alloy (i.e. Au-palladium (Pd), (Au-(2%)Pd)), and tertiary alloy (i.e. Au-Pt-copper (Cu), (Au-(5%)Pt-(0.5%)Cu)) electric contacts. The micro-switches with bi-metallic and binary alloy contacts resulted in contact resistance between 1-2 /spl Omega/ and, when compared to micro-switches with sputtered Au electric contacts, exhibited a 3.3 and 2.6 times increase in switching lifetime, respectively. The tertiary alloy exhibited a 6.5 times increase in switch lifetime …
A Comparison Of Micro-Switch Analytic, Finite Element, And Experimental Results, Ronald A. Coutu Jr., P. E. Kladitis, Lavern A. Starman, J. R. Reid
A Comparison Of Micro-Switch Analytic, Finite Element, And Experimental Results, Ronald A. Coutu Jr., P. E. Kladitis, Lavern A. Starman, J. R. Reid
Electrical and Computer Engineering Faculty Research and Publications
Electrostatically actuated, metal contact, micro-switches depend on having adequate contact force to achieve desired, low contact resistance. In this study, higher contact forces resulted from overdriving cantilever beam style switches, after pull-in or initial contact, until the beam collapsed onto the drive or actuation electrode. The difference between initial contact and beam collapse was defined as the useful contact force range. Micro-switch pull-in voltage, collapse voltage, and contact force predictions, modeled analytically and with the CoventorWare finite element software package, were compared to experimental results. Contact resistance was modeled analytically using Maxwellian spreading resistance theory. Contact resistance and contact …