Open Access. Powered by Scholars. Published by Universities.®
Articles 1 - 1 of 1
Full-Text Articles in Engineering
Micro Electromechanical Relays And Their Application In Variable Inductor Networks, Shifang Zhou
Micro Electromechanical Relays And Their Application In Variable Inductor Networks, Shifang Zhou
Dissertations
A family of microrelay devices together with integrated inductor networks has been designed, simulated, fabricated and experimental characterized. These switched networks utilize microelectromechanical systems (MEMS) as a fabrication technology and take advantage of the economies of semiconductor cleanroom batch-processing.
A new type of microrelay has been developed using a suspended TaSi2/SiO2 bimorph cantilever beam, gold-to-gold electrical contact, aluminum as sacrificial layer, and a combined thermal and electrostatic means of actuation. For the first time a micro variable inductor network which is digitally controlled by microrelays has been demonstrated. A test structure for electrical micro contact characterization has …