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Cross-Sectional Dilation Mode Resonator With Very High Electromechanical Coupling Up To 10% Using Aln, Chengjie Zuo, Changhan Yun, Philip Stephanou, Sang-June Park, Chi-Shun Lo, Robert Mikulka, Je-Hsiung Lan, Mario Velez, Ravi Shenoy, Jonghae Kim, Matt Nowak
Cross-Sectional Dilation Mode Resonator With Very High Electromechanical Coupling Up To 10% Using Aln, Chengjie Zuo, Changhan Yun, Philip Stephanou, Sang-June Park, Chi-Shun Lo, Robert Mikulka, Je-Hsiung Lan, Mario Velez, Ravi Shenoy, Jonghae Kim, Matt Nowak
Chengjie Zuo
For the first time in the development of piezoelectric micromechanical resonators, this paper presents a new class of cross-sectional dilation mode resonators (XDMR) that achieve unprecedentedly high electromechanical coupling constant: kt2 up to 10% for aluminum nitride (AlN) based resonators and 19% for zinc oxide (ZnO) based resonators. Detailed discussions on the geometry design, FEM simulation, and process challenge are provided in this paper to give insight on this novel high-kt2 piezoelectric resonator technology and, more importantly, guide the future development of mechanical resonators with coherent 2D/3D mode shapes.