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Very High Frequency Channel-Select Mems Filters Based On Self-Coupled Piezoelectric Aln Contour-Mode Resonators, Chengjie Zuo, Nipun Sinha, Gianluca Piazza
Very High Frequency Channel-Select Mems Filters Based On Self-Coupled Piezoelectric Aln Contour-Mode Resonators, Chengjie Zuo, Nipun Sinha, Gianluca Piazza
Chengjie Zuo
This paper reports experimental results on single-chip multi-frequency channel-select filters based on self-coupled piezoelectric aluminum nitride (AlN) contour-mode microelectromechanical (MEMS) resonators. Two-port AlN contour-mode resonators are connected in series and electrically coupled using their intrinsic capacitance to realize multi-frequency (94–271 MHz), narrow bandwidth (~0.2%), low insertion loss (~2.3 dB), high off-band rejection (~60 dB) and high linearity (IIP3 ~100 dBmV) channel-select filters on the same chip. This technology enables multi-frequency, high-performance and small-form-factor filter arrays and makes a single-chip multi-band reconfigurable radio frequency (RF) solution possible in the near future.