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Reconfigurable Cmos Oscillator Based On Multifrequency Aln Contour-Mode Mems Resonators, Matteo Rinaldi, Chengjie Zuo, Jan Van Der Spiegel, Gianluca Piazza

Chengjie Zuo

This paper reports on the first demonstration of a reconfigurable complementary-metal-oxide-semiconductor (CMOS) oscillator based on microelectromechanical system (MEMS) resonators operating at four different frequencies (268, 483, 690, and 785 MHz). A bank of multifrequency switchable AlN contour-mode MEMS resonators was connected to a single CMOS oscillator circuit that can be configured to selectively operate in four different states with distinct oscillation frequencies. The phase noise (PN) of the reconfigurable oscillator was measured for each of the four different frequencies of operation, showing values between −94 and −70 dBc/Hz at a 1-kHz offset and PN floor values as low as −165 …