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Full-Text Articles in Engineering
Aluminum Nitride Reconfigurable Rf-Mems Front-Ends, Augusto Tazzoli, Matteo Rinaldi, Chengjie Zuo, Nipun Sinha, Jan Van Der Spiegel, Gianluca Piazza
Aluminum Nitride Reconfigurable Rf-Mems Front-Ends, Augusto Tazzoli, Matteo Rinaldi, Chengjie Zuo, Nipun Sinha, Jan Van Der Spiegel, Gianluca Piazza
Chengjie Zuo
Aluminum Nitride based piezoelectric microelectromechanical systems (MEMS) technology has the potential to develop a fully integrated radio frequency (RF) platform that satisfies the requirements of next-generation communication standards: reconfigurability, miniaturization, and low power consumption. Here we report on the recent developments of this AlN thin-film based technology, namely resonators, filters, oscillators and switches. These examples highlight how MEMS will enable the mass manufacturing of reconfigurable RF front-ends.
Dual-Mode Resonator And Switchless Reconfigurable Oscillator Based On Piezoelectric Aln Mems Technology, Chengjie Zuo, Jan Van Der Spiegel, Gianluca Piazza
Dual-Mode Resonator And Switchless Reconfigurable Oscillator Based On Piezoelectric Aln Mems Technology, Chengjie Zuo, Jan Van Der Spiegel, Gianluca Piazza
Chengjie Zuo
For the first time, this work demonstrates a switchless dual-frequency (472 MHz and 1.94 GHz) reconfigurable CMOS oscillator using a single piezoelectric AlN microelectromechanical-systems resonator with coexisting S0 and S1 Lamb-wave modes of vibration. High performance (high quality factor Q and electromechanical coupling factor kt2 for a resonator and low phase noise for an oscillator) has been achieved for both the resonator and oscillator in terms of dual-mode operation. In particular, 1.94-GHz operation has the best phase noise performance at 1-MHz offset when compared with all previously reported CMOS oscillators that work at a similar frequency.
Reconfigurable Cmos Oscillator Based On Multifrequency Aln Contour-Mode Mems Resonators, Matteo Rinaldi, Chengjie Zuo, Jan Van Der Spiegel, Gianluca Piazza
Reconfigurable Cmos Oscillator Based On Multifrequency Aln Contour-Mode Mems Resonators, Matteo Rinaldi, Chengjie Zuo, Jan Van Der Spiegel, Gianluca Piazza
Chengjie Zuo
This paper reports on the first demonstration of a reconfigurable complementary-metal-oxide-semiconductor (CMOS) oscillator based on microelectromechanical system (MEMS) resonators operating at four different frequencies (268, 483, 690, and 785 MHz). A bank of multifrequency switchable AlN contour-mode MEMS resonators was connected to a single CMOS oscillator circuit that can be configured to selectively operate in four different states with distinct oscillation frequencies. The phase noise (PN) of the reconfigurable oscillator was measured for each of the four different frequencies of operation, showing values between −94 and −70 dBc/Hz at a 1-kHz offset and PN floor values as low as −165 …
Switch-Less Dual-Frequency Reconfigurable Cmos Oscillator Using One Single Piezoelectric Aln Mems Resonator With Co-Existing S0 And S1 Lamb-Wave Modes, Chengjie Zuo, Jan Van Der Spiegel, Gianluca Piazza
Switch-Less Dual-Frequency Reconfigurable Cmos Oscillator Using One Single Piezoelectric Aln Mems Resonator With Co-Existing S0 And S1 Lamb-Wave Modes, Chengjie Zuo, Jan Van Der Spiegel, Gianluca Piazza
Chengjie Zuo
For the first time, this work demonstrates a switch-less dual-frequency (472-MHz and 1.94-GHz) reconfigurable CMOS oscillator using a single piezoelectric AlN MEMS resonator with co-existing S0 and S1 Lamb-wave modes of vibration. High performances (high Q and kt2 for a resonator and low phase noise for an oscillator) have been achieved for both the resonator and oscillator in terms of dual-mode operation. Especially, the 1.94-GHz operation has the best phase noise performance when compared with all previously reported CMOS oscillators that work at a similar frequency.