Engineering Commons^™

High Performance Micropane Electron Beam Window, Roger A. Dougal, Shengyi Liu

Faculty Publications

A silicon disk etched so that it contains a multitude of microscopic and thin window panes (micropanes) can potentially transmit a larger average electron beam current density and absorb a smaller fraction of the beam energy than a common metal foil window. The enhanced performance is achieved by a combination of decreased power loss due to the extremely small window thickness (~1 μm), and increased conductive cooling due to the small diameter (~50 μm) of the micropanes and the large cross section of the honeycomb structure that supports the micropanes. Beam current densities up to 34 A/cm2 are permitted within …