Open Access. Powered by Scholars. Published by Universities.®
Articles 1 - 1 of 1
Full-Text Articles in Engineering
Study Of Structure And Quality Of Different Silicon Oxides Using Ftir And Raman Microscopy, C. Moore, T. S. Perova, B. Kennedy, Kevin Berwick, I. I. Shaganov, R. A. Moore
Study Of Structure And Quality Of Different Silicon Oxides Using Ftir And Raman Microscopy, C. Moore, T. S. Perova, B. Kennedy, Kevin Berwick, I. I. Shaganov, R. A. Moore
Articles
In this work, SiO2 and fluorine and phosphorous doped SiO2 thin films are investigated using FTIR and Raman techniques. FTIR spectroscopy was performed at normal and oblique incidence of the probe beam in transmission and reflection modes. The effect of polarisation and angle of incidence of the probe beam is examined for the case of reflection mode. Infrared spectra taken from doped oxides show that the structure changes with the passage of time. Alternate methods to calculate the thickness of the doped film are therefore discussed. Infrared spectra of electron beam evaporated oxides give valuable information on their …